Facilities
Benton Facility
The UFNF facility in Benton Hall consists of a total of over 5300 square feet of laboratory and support space; with slightly more than 2700 square feet of class 1000 or better clean-room space. The mission of the facility is to provide space, training, support and consultation so that a wide variety of researchers can accomplish their Nano-fabrication research goals.
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General Utilities nt
  • Electrical power to include 110, 208 3ph, 480 3ph. 5 wire runs with independent earthling
  • Compressed Dry Air (CDA) at 90 to 120 psi with up to 45 CFM throughput
  • House dry N2 and LN2 from an external storage unit
  • House vacuum up to 30 inches Hg for process sample handling
  • House chilled water circuit at 10 to 20 C, 25 gpm at 45psi
  • Eleven individual ventilation conduits to roof stacks for fume removal
  • HVAC and HEPA filtration units
Specialized Utilities
  • Ultra pure N2, He, O2, Ar, and forming gas (4% H2)
  • Process gasses including Silane, anhydrous Ammonia, methane, TCA, SF6, CF4, C4F8, and H2