| Equipment |
Area |
Location |
| Dicing Saws |
Back End Processing |
Benton |
| Gold Ball Bonder |
Back End Processing |
Benton |
| Inspection Scopes |
Back End Processing |
Benton |
| Manual Die Bonding |
Back End Processing |
Benton |
| Wedge Bonder |
Back End Processing |
Benton |
| |
|
|
| 4 Pt Resistivity Probe |
Characterization Equip. |
Benton |
| 5 PT Probe Station |
Characterization Equip. |
Benton |
| CV Tester |
Characterization Equip. |
Benton |
| Dectak II A Profilemeter |
Characterization Equip. |
Benton |
| Inspection Scopes |
Characterization Equip. |
Benton |
| Nanometrics Nanospec |
Characterization Equip. |
Benton |
| Prometrix Wafer Resistivity Mapper |
Characterization Equip. |
Benton |
| |
|
|
| Tellmark E-beam |
Deposition |
Benton |
| Varian 3 Pocket E-beam |
Deposition |
Benton |
| |
|
|
| Asher |
Dry Etching |
Benton |
| Tegal 701 RIE |
Dry Etching |
Benton |
| STS Deep RIE |
Dry Etching |
Benton |
| |
|
|
| BTI Atmospheric Tube Furnace Sys. |
Furnace |
Benton |
| BTI LPCVD |
Furnace |
Benton |
| Heatpulse 2100 RTA |
Furnace |
Benton |
| |
|
|
| EVG 620 |
Photolithography |
Benton |
| Headway Spin Coater 1 |
Photolithography |
Benton |
| Headway Spin Coater 2 |
Photolithography |
Benton |
| KS MA4 |
Photolithography |
Benton |
| KS MJB3 |
Photolithography |
Benton |
| Other Equipment |
Photolithography |
Benton |
| |
|
|
| EVG 501 Wafer Bonder |
Wafer Bonding |
Benton |
| |
|
|
| Wet Bench |
Wet Processing & Wafer Prep |
Benton |
| Dry Processing Bench |
Wet Processing & Wafer Prep |
Benton |
| Spin Rinse Dryer |
Wet Processing & Wafer Prep |
Benton |
| Other Equipment |
Wet Processing & Wafer Prep |
Benton |
| |
|
|
| Maintenance Equipment |
|
Benton |
| |
|
|
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