Micro- / Nano- fabrication Charging Chart
NRF Cleanroom charging chart (Effective January 1, 2009)
| Academic Rates | Non-Academic Rates | Affiliate Rates |
| Base Rate ($/hour) | Staff Assist ($42/hour) | Base Rate ($/hour) | Staff Assist ($150/hour) | Base Rate ($/hour) | Staff Assist ($100/hour) | |
| Mask Aligner – Front Side Align | $21.00 | $63.00 | ||||
| EVG 620 Mask Aligner – Back Side Align | $29.40 | $71.40 | ||||
| Spinner (a $4.00 chemical surcharge applies for each use) | $21.00 | $63.00 | ||||
| Bake | $21.00 | $63.00 | ||||
| E-Beam Lithography | $71.40 | $113.40 | $300.00 | $150.00 | ||
| Rapid Thermal Annealing | $21.00 | $63.00 | ||||
| PECVD Deposition | $25.20 | $67.20 | ||||
| Wet Benches (a $4.00 chemical surcharge applies for each use) | $25.20 | $67.20 | ||||
| Reactive Ion Etching | $25.20 | $67.20 | ||||
| Deposition, Sputter or E-beam | $25.20 | $67.20 | $100.00 | $75.00 | ||
| materials surcharge for NRF-provided source materials in sputter or evap deposition ( surcharge per 50 nm) | ||||||
| gold | $15.00 | |||||
| platinum | $15.00 | |||||
| iridium | $5.00 | |||||
| ruthenium | $5.00 | |||||
| all others (metals, insulators, semiconductors) | $2.00 | |||||
| Wafer Bonding | $29.40 | $71.40 | ||||
| General use Diffusion Furnace | $29.40 | $71.40 | ||||
| Oxidation Furnace | $42.00 | $84.00 | ||||
| LPCVD Deposition | $42.00 | $84.00 | ||||
| STS Deep Reactive Ion Etching | $42.00 | $84.00 | $100.00 | $80.00 | ||
| Die or Wire Bonding | $21.00 | $63.00 | $100.00 | $70.00 | ||
| Ellipsometer, Profilometer, Photospectrometer(Nanospec) | $21.00 | $63.00 | ||||
| Dicing Saw | $21.00 | $63.00 | $50.00 | $40.00 | ||
| Lapping/polishing | $21.00 | $63.00 | $100.00 | $50.00 | ||
| Probe Station | $21.00 | $63.00 | ||||
| Hall Probe | $21.00 | $63.00 | ||||
| Asher | $21.00 | $63.00 | ||||
| Plasma Sciences | $25.20 | $67.20 | ||||
| Yearly Cap (Per User) | $7500 | $20,000 | $20,000 | |||
| Cleanroom access fee (daily) | $10.00/day | $50/day | $40/day |
Additional notes:
There are no charges assessed for training.
For user-supplied sputter deposition or e-beam evaporation source materials, no materials surcharge will be assessed.
There is a $7500/year cap on total charges per individual user. Accumulated charges are calculated per fiscal year (July 1-June 30). Once cap total is reached, user will not be assessed charges for remainder of fiscal year with the exception of surcharges for precious metals.
Assessed charges are made in 30 minute increments.
Unused reservations that are not cancelled within 4 hour of schedule start time will be charged the full time reserved by the user.
