Equipment - Physics Facility
 |
||
PHYSICS |
||
 |
||
Tencor Alphastep 200 Profilometer
Description: A profilometer is a non-destructive, easy-to-use for step measurement. A diamond-tipped stylus is in direct contact and is scanned across the surface. The resolution of the measurement is dependent on the radius of the stylus and the geometries of the features. It is non-destructive although it does come in contact with the sample. The unit is easy-to-use for step measurement. A diamond-tipped stylus is in direct contact and is scanned across the surface. The resolution of the measurement is dependent on the radius of the stylus and the geometries of the features.
The AlphaStep 200 is equipped with a standard stylus of 12.5 micron radius. Sample leveling will be automatically computed after scan. The scan area is imaged on a high-contrast, 9-inch CRT.
| Maximum sample thickness | 16.5 mm |
| Maximum sample diameter | 162 mm |
| KiloAngstrom mode | maximum range ±160 kiloAngstrom, resolution 5 Angstrom |
| Micron mode | maximum range ±160 microns, resolution 5 nanometers |
| Scan lengths | 80, 400, 2,000, 10,000 microns |
