| Equipment |
Area |
Location |
SOP
|
| Dicing Saws |
Back End Processing |
Benton |
|
|
| Gold Ball Bonder |
Back End Processing |
Benton |
|
|
| Inspection Scopes |
Back End Processing |
Benton |
|
|
| PWS P5 Fully Automatic Probing System |
Back End Processing |
Physics |
|
|
| Manual Die Bonding |
Back End Processing |
Benton |
|
|
| Wedge Bonder |
Back End Processing |
Benton |
|
|
| |
|
|
|
|
| 4 Pt Resistivity Probe |
Characterization Equip. |
Benton |
|
|
| 5 PT Probe Station |
Characterization Equip. |
Benton |
|
|
| CV Tester |
Characterization Equip. |
Benton |
|
|
| Dectak II A Profilemeter |
Characterization Equip. |
Benton |
|
|
| Inspection Scopes |
Characterization Equip. |
Benton |
|
|
| Lakeshore
7507 Hall Effect - Electronic Measurement |
Characterization Equip. |
Physics |
|
|
| Nanometrics Nanospec |
Characterization Equip. |
Benton |
|
|
| Prometrix Wafer Resistivity Mapper |
Characterization Equip. |
Benton |
|
|
| Tencor Profilometer |
Characterization Equip. |
Physics |
MS Word |
PDF |
| |
|
|
|
|
| KJL CMS-18
Multi-target Sputter Deposition |
Deposition |
Physics |
|
|
| STS 310PC
PECVD |
Deposition |
Physics |
MS Word
|
PDF
|
| Tellmark E-beam |
Deposition |
Benton |
|
|
| Varian 3 Pocket E-beam |
Deposition |
Benton |
|
|
| |
|
|
|
|
| Anatech
SCE600 Asher |
Dry Etching |
Physics |
|
|
| Asher |
Dry Etching |
Benton |
|
|
| Plasma
Sciences RIE 200W |
Dry Etching |
Physics |
|
|
| Tegal 701 RIE |
Dry Etching |
Benton |
|
|
| STS Deep RIE |
Dry Etching |
Benton |
|
|
| Unaxis
Shuttlelock RIE-ICP |
Dry Etching |
Physics |
|
|
| |
|
|
|
|
| BTI Atmospheric Tube Furnace Sys. |
Furnace |
Benton |
|
|
| BTI LPCVD |
Furnace |
Benton |
|
|
| Heatpulse 2100 RTA |
Furnace |
Benton |
|
|
| |
|
|
|
|
| EVG 620 |
Photolithography |
Benton |
|
|
| Lindberg Blue M Ovens |
Photolithography |
Physics |
|
|
| Headay 4" Spinner |
Photolithography |
Physics |
|
|
| Headway Spin Coater 1 |
Photolithography |
Benton |
|
|
| Headway Spin Coater 2 |
Photolithography |
Benton |
|
|
| Laurell Spinner |
Photolithography |
Physics |
MS Word |
PDF |
| KS MA4 |
Photolithography |
Benton |
|
|
| KS MA6
Aligner |
Photolithography |
Physics |
|
|
| KS MJB3 |
Photolithography |
Benton |
|
|
| KS MJ55 Aligner |
Photolithography |
Physics |
|
|
| OAI 360-440nm Flood Expose |
Photolithography |
Physics |
|
|
| Other Equipment |
Photolithography |
Benton |
|
|
| Raith
150 E-Beam Lithography System |
E-Beam Lithography |
Physics |
|
|
| |
|
|
|
|
| Steag 100CS
RTP |
Thermal Processing |
Physics |
|
|
| |
|
|
|
|
| EVG 501 Wafer Bonder |
Wafer Bonding |
Benton |
|
|
| PWS
Wafter Prober |
|
Physics |
|
|
| |
|
|
|
|
| Wet Bench |
Wet Processing & Wafer Prep |
Benton |
|
|
| Wet
Process Bench - Acids and HF |
Wet Processing & Wafer Prep |
Physics |
|
|
| Dry Processing Bench |
Wet Processing & Wafer Prep |
Benton |
|
|
| Spin Rinse Dryer |
Wet Processing & Wafer Prep |
Benton |
|
|
| Other Equipment |
Wet Processing & Wafer Prep |
Benton |
|
|
| |
|
|
|
|
| Maintenance Equipment |
|
Benton |
|
|
| |
|
|
|
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