Equipment - Physics Facility
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PHYSICS |
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| Equipment | Area | Location | SOP
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| PWS P5 Fully Automatic Probing System | Back End Processing | Physics | ||
| Lakeshore 7507 Hall Effect - Electronic Measurement | Characterization Equip. | Physics | ||
| Tencor Profilometer | Characterization Equip. | Physics | MS Word | |
| KJL CMS-18 Multi-target Sputter Deposition | Deposition | Physics | ||
| STS 310PC PECVD | Deposition | Physics | ||
| Anatech SCE600 Asher | Dry Etching | Physics | ||
| Plasma Sciences RIE 200W | Dry Etching | Physics | ||
| Unaxis Shuttlelock RIE-ICP | Dry Etching | Physics | MS Word
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| Laurell Spinner | Photolithography | Physics | MS Word | |
| Lindberg Blue M Ovens | Photolithography | Physics | ||
| Headay 4" Spinner | Photolithography | Physics | ||
| KS MA6 Aligner | Photolithography | Physics | ||
| KS MJ55 Aligner | Photolithography | Physics | ||
| OAI 360-440nm Flood Expose | Photolithography | Physics | ||
| Raith 150 E-Beam Lithography System | E-Beam Lithography | Physics | ||
| Steag 100CS RTP | Thermal Processing | Physics | ||
| PWS Wafter Prober | Physics | |||
| Wet Process Bench - Acids and HF | Wet Processing & Wafer Prep | Physics | ||
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